Dieter K. Schroder
Thomas J. Shaffner
Center for Professional
The course is also available as an industrial in-house course and as a web course
This three-day intensive short course has been given at Arizona State University and at a variety of industrial and government labs. since 1982 by Dieter Schroder and Tom Shaffner, both experts in their respective fields. It is continually revised to remain up-to-date. It provides both an introduction and an update to the area of semiconductor materials and device measurements, as well as the interpretation of these measurements. It gives guidance to the choice of measurement that best fits your problem or application. Many semiconductor courses stress the theory and design of semiconductor devices and circuits, but their characterization is generally not adequately addressed. This course is designed to fill that gap. These characterization techniques are at the forefront in the development of advanced characterization methods for future applications. This is especially important today where device design, with ever decreasing dimensions and increasing performance, places continually increasing demands upon both materials and device characterization. A number of recent, new techniques have been developed but are frequently not used because people are unfamiliar with them. This issue will also be addressed.
You Can Expect To Learn
Microscopy and Spectroscopy
Beam Microscopy (High Resolution Imaging)
Beam Analysis (Dopants and Impurities)
Techniques (Contamination and Physical Defects)
Dieter Schroder, Professor of Electrical Engineering at Arizona State University, has worked with semiconductor material and device electrical characterization for the last 30 years at the Westinghouse R&D Labs. and at Arizona State University. His current research interests are Si materials and devices, which are major thrusts of ASU's Center for Solid State Electronics Research and Center for Low Power Electronics. He has used electrical measurements in the analysis of power and MOS devices, as well as visible and infrared imaging devices. He is author of the books Advanced MOS Devices and Semiconductor Material and Device Characterization, 3rd Ed., Wiley-Interscience in 2006 and has published many papers on semiconductor characterization and device physics. He is a LifeFellow of IEEE.
Tom Shaffner, group leader of Materials Technology in the Semiconductor Electronics Division at the National Institute of Standards and Technology, has been active in characterization programs involving semiconductor and polymeric materials in industrial and academic laboratories over the past 30 years. His research interests cover a broad range of topics, including x-ray diffraction and spectroscopy, electron microscopy, techniques of surface science and methods of electron beam and x-ray lithography for microcircuit fabrication. He has lectured and published extensively in these fields and participated in the organization of regional and international materials characterization workshops and conferences. He is a past editor of Semiconductor Science and Technology, and author of the book Semiconductor Measurements and Instrumentation, published by McGraw-Hill in 1998 and many papers on semiconductor characterization.